Hiroyuki Kato

EBARA Precision Machinery Europe (EPME)

EBARA Precision Machinery Europe (EPME) is part of the EBARA Group and was established in Germany in 1994. EPME is headquartered in Sauerlach near Munich in Germany. We are also located in Austria, France, Ireland, Italy, Israel, United Kingdom. It employees over 200 people in Europe. Furthermore, EPME has representatives for Belgium, Switzerland and the Netherlands. The EPME portfolio includes dry and turbo molecular vacuum pumps as well as gas abatement systems. EPME distributes state-of-the-art CMP tools, wafer bevel polishing and substrate coating systems. In Europe, EPME has a central warehouse and two overhaul centres for EBARA vacuum dry pumps and third party pumps in Scotland and Germany. EBARA Corp. headquartered in Tokyio, Japan, was established 1912. The EBARA Group is No 1 in the world market for bevel polishing systems and a strong No 2 worldwide for vacuum pumps and CMP tools. Over 80% of the top 20 of chip manufacturers are customers of EBARA.