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Airgard - An Exyte Group Co

Airgard Incorporated is a Silicon Valley-based manufacturer of pollution abatement equipment for the semiconductor industry. Founded in 1988, Airgard manufacturers point-of-use scrubbers that can reduce a process tool's scrubber-related downtime to zero. The patented scrubbing technology, automated gas inlet plunger, and custom scrubber inlets are tailored to individual processes, whether it be epitaxial, metal etch, poly etch, or CVD, in order to provide maximum up-time and process stability.